● Semi Equipment Solutions
● Repair Solutions
● Overhaul Solutions
● Semi-System Improve
● AMAT
● LAM
● Mattson
● Neex(TEL)
● Nordson
● Oerilkon
● Ulvace
RF/ Microwave /DC power supply/ Ozone generator, Ozone sensor/CMP motor/ETO system/RPS。
ETO system/RPS
● ETO system 故障分析與排除
● 半導體製程電漿特性量測及分析
● 訓練課程
● RPS performance monitor system
● Microwave power system monitor