Up to 2 slm NF3 With Ar 1 to 10 torr operation Countinuous oeration
Up to 3 slm NF3 no Ar
start / operation 1 to 10 torr operation Countinuous oeration 1.5 gpm cooling water
Up to 6/8 slm NF3 no Ar operation 1 to 10+ torr operation Countinuous oeration 2 gpm cooling water
Up to 15 slm NF3 no Ar
operation 8 to 10+ torr operation Countinuous oeration 2.6 gpm cooling water